微小气体质量流量计控制器带显示精密小流量流量计气体质量流量计

The mass flow controller is the key to semiconductor manufacturing equipment. It uses the principle that temperature changes correspond to mass flow and can measure and control the flow of different gases.
The mass flow controller has a wide range of applications, which can meet the working conditions of the gas flow control range from milliliters to hundreds of upgrades, and is not affected by changes in ambient temperature and pressure.

Model TCP mass flow controller
Range 5SCCM 1SLM 30SLM
50SCCM 5SLM 50SLM
100SCCM 10SLM 100SLM
500SCCM 20SLM 500SLM
Accuracy ±1%S.P.（Q＞20%F.S.） ±0.2%F.S.（Q≤20%F.S.）
Flow rate at fully closed control valve ≤0.5% F.S.
Flow rate measurement range 0.5~ F.S.
Flow rate control range 1.5~ F.S.
linearity ≤ ±0.5%F.S.
Repeatability ≤ ±0.2% F.S.
Response ≤0.7s（Varies depending on the range）
Temperature coefficient
≤± 0.02% S.P. /℃
Maximum working pressure 0.5Mpa
Leak integrity ≤ 5 x 10 -12 Pa•m 3 /sec (He)
Operating ambient temperature 5~50℃
Input signal
Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC（4-20mA）
Output signal Digital: RS485、DeviceNet、profibus、EtherCAT；Analog: 0 to 5 V DC（4-20mA）
Standard fitting
VCR：1/4”、1/2”

IGS： 1.125 inch 、 1.5 inch （C-Seal、W-Seal）

Swagelok：1/4"、3/8"、1/2"