框架接口模块1756-OB16IS

1756-OB16IS

1756-OB16IS

1756-OB16IS

其中PLC作为控制运算中心，光栅尺作为检测装置检测气缸活塞移动量，并将检测结果通过PLC的模拟量输入端子反馈到PLC内部，与设定值比较，并进行PID调节，PID运算结果通过PLC的继电器输出接口驱动交流或直流电磁阀，由电磁阀的开关改变气缸活塞移动的流量，使气缸准确运动到目标位置，达到准确定位的目的。

Nor-Cal ANC-NW-40-ISO-100-OF 

Lam Research 810-02433R 

Daifuku LED-3695A 

Integrated Measurement Systems 100-0092-001B 

Tylan General FC-260KZ

AMAT Applied Materials 0240-47188 

AMAT Applied Materials 0110-01139 

AMAT Applied Materials 0200-09092

Nikon PS8-102G 

Nikon 200mm Wafer Indexer Lift with Loader Asyst 03365-008 

M-712E 

Asyst Shinko VHT5-1-1

Metron 16-193623-01 

STEC SEC-7340M 

AMAT Applied Materials 0200-10448 

Komatsu Electronics BAMA01263 

Nor-Cal Products 67211.00024.999

Nikon 4S007-664 

Yaskawa Electric XU-DL2110 

Perkin-Elmer 851-8518-004

Mykrolis WGMSA1HRU 

Tazmo E0R05-9538 

KLA Instruments 710-650044-20

AMAT Applied Materials 0242-31591 

Motorola 01-W3866B 54B

AMAT Applied Materials 0100-00060 

SMC ISE80-DUP00813 

Keyence BL-185 

AMAT Applied Materials 0020-78127

ASM 1017-329-01

Celerity UFC-8564 

McDowell & Company 19850 Aluminum Focus Ring ASM 4601133-0001